The University of Toledo

PVD75 Electron Beam Evaporation

Electron beam evaporation is a deposition process is where a piece of the material (source) is heated until it evaporates. The material then condenses on all the surrounding surfaces, including the substrate. The electron beam is used to heat the source material. This process is often used for metals, and anti-reflection coating due to it quick deposition rate and cheaper material costs.